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Characterization of field-effect mobility at optical frequency by microring resonators

https://doi.org/10.1364/PRJ.416656

Hsu, Wei-Che ; Li, Erwen ; Zhou, Bokun ; Wang, Alan X. ( March 2021 , Photonics Research)

A novel characterization method is proposed to extract the optical frequency field-effect mobility ( $μ_{op, FE}$ ) of transparent conductive oxide (TCO) materials by a tunable silicon microring resonator with a heterogeneously integrated titanium-doped indium oxide $(ITiO) / {SiO}_{2} / silicon$ metal–oxide–semiconductor (MOS) capacitor. By operating the microring in the accumulation mode, the quality factor and resonance wavelength shift are measured and subsequently used to derive the $μ_{op, FE}$ in the ultra-thin accumulation layer. Experimental results demonstrate that the $μ_{op, FE}$ of ITiO increases from 25.3 to $38.4 {cm}^{2} ⋅ V^{- 1} ⋅ s^{- 1}$ with increasing gate voltages, which shows a similar trend as that at the electric frequency.

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